ASML DUV lithography systems
Deep-ultraviolet scanners, dry and immersion, that pattern the majority of layers on a chip.
Find alternatives to ASML DUV lithography systems
No charging model could be established from an official page. Systems are sold under individual contracts.
What it does
- Semiconductor manufacturing equipment
Sources
- Pricing
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Official documentation · 2 Sep 2026
Verified 2026-09-02: URL 200, name and product unchanged, no price published.
- Sold within
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ASML's own page lists the DUV system models (TWINSCAN NXT/XT families) with no price and no purchase route stated anywhere on the page.
Also from ASML
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ASML EUV lithography systems Hardware
Extreme-ultraviolet lithography machines used to print the leading-edge nodes most AI accelerators are made on.
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Measures and inspects wafers between process steps so defects are caught before they reach a finished die.
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ASML refurbished lithography systems Hardware
ASML reconditions and resells older PAS 5500 and TWINSCAN XT/NXT DUV lithography systems with a new warranty and extended-lifetime support.
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