K

eSL10

Hardware

by KLA

E-beam patterned-wafer defect inspection system that finds defects other inspectors miss, using KLA's SMARTs deep-learning algorithms to separate defects of interest inline at leading logic and memory fabs.

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What it does

• Semiconductor manufacturing equipment
• Industrial automation
• Data analysis
• Visual inspection

Features 6

• High ResolutionHigh beam current operation achieves high resolution e-beam imaging at high speed to identify critical gap defects.
• Wide Operating RangeElectron optics operate across a wide range of beam currents, supporting 3D NAND, DRAM and logic manufacturing.
• High Beam Current DensityElectron optics deliver high beam current density at a small spot size for high-sensitivity inspection.
• Yellowstone scanning modeProduces 10 billion pixels per scan at high speed and resolution over a large field of view.
• Simul-6 sensor technologyCollects secondary and back scattered electrons in one scan to gather surface, topographic and material contrast information.
• SMARTs deep learningIntegrated AI with deep learning algorithms that discriminate subtle defect signals from pattern and process noise.

Sources

Pricing

Not found · 10 Oct 2026

No published price; contact form only (standard s4.1 row 3), as for the sibling Voyager 1035.

Description

Official documentation · 10 Oct 2026

"captures and identifies defects not found by other inspectors"; Artificial Intelligence tab: "the first defect inspection system with integrated Artificial Intelligence, the eSL10 employs SMARTs deep learning algorithms".

Sold within

Not found · 10 Oct 2026

Product page offers only "Contact Us"; no route or packaging is stated (standard s4).

Name

Official documentation · 10 Oct 2026

"The eSL10 e-beam patterned wafer defect inspection system".

URL

Official documentation · 10 Oct 2026

KLA's own product page, title "eSL10 e-Beam Defect Inspection | Chip Manufacturing | KLA"; read in a browser 2026-10-10 (KLA blocks WebFetch).

Deployment

Official documentation · 10 Oct 2026

A fab inspection tool installed on the customer's line.

Also from KLA

• Voyager 1035 Hardware

  Laser-scanning patterned-wafer inspection system for advanced logic and memory fabs, built around DefectWise, a deep-learning algorithm that separates defects of interest from pattern noise and nuisance defects inline to speed up process-excursion diagnosis.

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