OPTELICS AI²
Automatic inspection and review system for semiconductor wafers that combines defect inspection, high-magnification review and 3D surface profiling in one device, with deep learning-based image classification.
Find alternatives to OPTELICS AI²
What it does
- Semiconductor manufacturing equipment
- Industrial automation
- Data analysis
- Visual inspection
Features 4
- High-speed inspectionInspects a whole 3-inch wafer in 15 minutes with sub-micron sensitivity.
- High-magnification reviewHigh-magnification surface shape profiling available by switching the objective lens.
- Deep learning-based classificationDeep learning-based high-precision image classification, patterned sample inspection and specific defect inspection.
- Transparent sample inspectionInspection, review and profiling of transparent samples without interference of backside reflection.
How it compares
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Voyager 1035
Named as a competitor in KLA's own 10-K; both are AI-enabled semiconductor-manufacturing-equipment vendors.
including companies such as Applied Materials, Inc., ASML Holding N.V., Hitachi High-Tech Corporation, Lasertec, Inc. and Onto Innovation, Inc.
Regulatory filing · 11 Oct 2026
Sources
- Pricing
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Capital equipment or software sold through the vendor's sales channel; no price on the product page.
- Description
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Official documentation · 11 Oct 2026
OPTELICS AI² page: "Deep learning-based high-precision image classification, patterned sample inspection, and inspection of specific types of defects".
- What it does
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Official documentation · 11 Oct 2026
OPTELICS AI² page: "Deep learning-based high-precision image classification, patterned sample inspection, and inspection of specific types of defects".
- Sold within
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Page offers "Request for product information, brochures" only; no price.
- Name
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Official documentation · 11 Oct 2026
Name as published on the product page.
- URL
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Official documentation · 11 Oct 2026
Product page, read 2026-10-11.
- Deployment
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Official documentation · 11 Oct 2026
On-premises inspection equipment.
- Modalities
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Official documentation · 14 Oct 2026
Page: 'Deep learning-based high-precision image classification'.
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