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SmartFactory AI Run-to-Run Advanced Recipe Tuning

Application

by Applied Materials

Software that augments existing run-to-run process control with machine learning models that recommend recipe parameter adjustments for high-mix, low-volume and nonlinear processes.

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What it does

• Industrial automation
• Data analysis
• Workflow automation

Sources

Pricing

Not found · 1 Sep 2026

Description

Official documentation · 30 Sep 2026

Applied: it "uses AI/ML to enhance existing R2R control systems, improving recipe adjustments for high-mix and low-volume semiconductor manufacturing"; it "Augments traditional R2R control systems with AI-enhanced recipe tuning recommendations" and "Delivers advanced control for nonlinear processes".

Sold within

Not found · 30 Sep 2026

Applied SmartFactory says the product "uses AI/ML to enhance existing R2R control systems" and "Augments traditional R2R control systems with AI-enhanced recipe tuning recommendations". It is described as working on top of a fab's existing run-to-run controller, but no named product is stated as a prerequisite or bundle, and no price or purchase route is given beyond "Let's connect".

Also from Applied Materials

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• SEMVision H20 Hardware

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• SmartFactory AI IQworks Platform

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• SmartFactory AI Predictive Metrology Application

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• SmartFactory Defect Classification Application

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• Vistara Hardware

  Modular wafer-processing platform holding four to twelve mixed ALD, CVD, epitaxy and etch chambers, instrumented with thousands of sensors that feed Applied's AIx software for machine-learning recipe acceleration.

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