AM

Vistara

Hardware

by Applied Materials

Modular wafer-processing platform holding four to twelve mixed ALD, CVD, epitaxy and etch chambers, instrumented with thousands of sensors that feed Applied's AIx software for machine-learning recipe acceleration.

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What it does

• Semiconductor manufacturing equipment
• Industrial automation
• Data analysis

Sources

Pricing

Not found · 1 Sep 2026

Sold within

Not found · 30 Sep 2026

Applied Materials says "Vistara™ is a modular platform architected on three pillars: flexibility, intelligence and sustainability." and that its sensors "feed massive, real-time data to Applied’s AIx™ software platform". Vistara is itself the equipment platform; the page states no price, no purchase route and no parent offering; the only route offered is Contact Sales.

Also from Applied Materials

• AIx Platform

  Applied's Actionable Insight Accelerator platform, which combines chamber sensors, inline metrology, digital twins and machine learning algorithms to optimise semiconductor process recipes from millions of wafer and chip measurements.

• Enlight 3 Optical Inspection Hardware

  Brightfield optical wafer inspection system whose third-generation ExtractAI technology pairs its scan data with SEMVision eBeam review to separate yield-killing defects from millions of nuisance signals.

• Kinex Hardware

  Integrated die-to-wafer hybrid bonding system for HBM, AI accelerators and co-packaged optics, with an AIx-powered software suite providing predictive maintenance, die-level traceability and multi-binning.

• SEMVision H20 Hardware

  Cold field emission eBeam defect review system that integrates deep learning AI to automatically extract and classify yield-killing defects from wafer inspection data.

• SmartFactory AI Run-to-Run Advanced Recipe Tuning Application

  Software that augments existing run-to-run process control with machine learning models that recommend recipe parameter adjustments for high-mix, low-volume and nonlinear processes.

• SmartFactory AI IQworks Platform

  Data and model management platform that covers the full AI/ML lifecycle for fabs, from data preparation and model building through deployment and drift monitoring, without requiring coding expertise.

• SmartFactory AI Predictive Metrology Application

  Fab software that uses machine learning to predict metrology measurement values in real time with confidence scores, reducing reliance on physical measurement and auto-retraining models when drift is detected.

• SmartFactory Defect Classification Application

  AI-based fab software that automatically detects and classifies wafer inspection images into more than 100 defect categories, replacing manual and rule-based defect review.

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