Defect Review SEM CR7300 Series
Inline defect-review scanning electron microscope for chip fabs, with high-speed automatic defect review and AI based automatic defect classification (ADC).
Find alternatives to Defect Review SEM CR7300 Series
What it does
- Semiconductor manufacturing equipment
- Industrial automation
- Data analysis
How it compares
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Voyager 1035
Named as a competitor in KLA's own 10-K; both are AI-enabled semiconductor-manufacturing-equipment vendors.
including companies such as Applied Materials, Inc., ASML Holding N.V., Hitachi High-Tech Corporation, Lasertec, Inc. and Onto Innovation, Inc.
Regulatory filing · 11 Oct 2026
Sources
- Pricing
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Capital equipment or software sold through the vendor's sales channel; no price on the product page.
- Description
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Official documentation · 11 Oct 2026
CR7300 page: "Improved defect classification performance and accuracy remarkably by adopting AI based ADC (Automatic Defect Classification)".
- What it does
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Official documentation · 11 Oct 2026
CR7300 page: "Improved defect classification performance and accuracy remarkably by adopting AI based ADC (Automatic Defect Classification)".
- Sold within
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Product page offers "Contact Us" only; capital fab equipment is quote-sold, the same shape as KLA's Voyager 1035.
- Name
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Official documentation · 11 Oct 2026
Name as published on the product page.
- URL
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Official documentation · 11 Oct 2026
Product page, read 2026-10-11.
- Deployment
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Official documentation · 11 Oct 2026
On-premises fab equipment.
- Modalities
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Official documentation · 14 Oct 2026
Page: 'New electron optics enables high resolution imaging of microscopic defects and provides advanced image processing using artificial intelligence (AI) to further enhance the image quality'.
Open Hitachi High-Tech in the directory
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